JPH0340497B2 - - Google Patents
Info
- Publication number
- JPH0340497B2 JPH0340497B2 JP61008228A JP822886A JPH0340497B2 JP H0340497 B2 JPH0340497 B2 JP H0340497B2 JP 61008228 A JP61008228 A JP 61008228A JP 822886 A JP822886 A JP 822886A JP H0340497 B2 JPH0340497 B2 JP H0340497B2
- Authority
- JP
- Japan
- Prior art keywords
- alignment
- beam splitter
- lens
- optical system
- reduction projection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 28
- 238000012545 processing Methods 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 238000005286 illumination Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 description 5
- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000003909 pattern recognition Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection
Landscapes
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61008228A JPS62165917A (ja) | 1986-01-17 | 1986-01-17 | 露光装置 |
| US07/004,133 US4724466A (en) | 1986-01-17 | 1987-01-16 | Exposure apparatus |
| US07/104,041 US4805000A (en) | 1986-01-17 | 1987-10-02 | Exposure apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61008228A JPS62165917A (ja) | 1986-01-17 | 1986-01-17 | 露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62165917A JPS62165917A (ja) | 1987-07-22 |
| JPH0340497B2 true JPH0340497B2 (en]) | 1991-06-19 |
Family
ID=11687300
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61008228A Granted JPS62165917A (ja) | 1986-01-17 | 1986-01-17 | 露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62165917A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996037326A1 (fr) * | 1995-05-26 | 1996-11-28 | Tetsuro Tagami | Mandrin pour outil de coupe |
-
1986
- 1986-01-17 JP JP61008228A patent/JPS62165917A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996037326A1 (fr) * | 1995-05-26 | 1996-11-28 | Tetsuro Tagami | Mandrin pour outil de coupe |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62165917A (ja) | 1987-07-22 |
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